Apex Mass Flow Controllers-Vacuum MFC Semi Compliant
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Apex Mass Flow Controller for Vacuum Applications

Our vacuum series Apex Mass Flow Controller is designed for new and retro-fit vacuum applications. Replace existing thermal mass flow controllers as ours is comparable form, fit and function.  Our enclosed valve design and fittings conforms to SEMI International Standards. Contact us to discuss how to switch to our multi-gas drop in replacement mass flow controllers. Gas connections are VCR.

 A 115V/60Hz power cable(PVPS24U) is available to power the unit.

The Apex Mass Flow Controller can be set via the on-board display or via 0-5V, 0-10V or 4-20 mamp signals. For the end user, flows can be read and the controller set via the on-board display. FlowVision Software can be purchased for using a computer to record and graph the flows. The gas selection can also be made from the computer.

For use with a system, a 6 ft. cable(DC-61) or a 25 ft. cable(DC-251) can be purchased in the communication cable section. One end is the 9 pin Din connector to connect to the Apex MFC, while the other end are blank wires.


Calibration Gas - Gas used for factory calibration. There are 98 on-board gases on each mass flow controller that can be chosen as the gas measured. The unit is in calibration for any of the gases in the library.

Flow Rate-  Full scale flow rate of the mass flow meter. Turndown ration is 200:1

Output - Output of the mass flow controller can be in the form of 0-5V, 0-10V or 4-20 mAmps. Every Apex device has RS-232 capability and does not need to be specified.

Secondary Output - Second output capability. This output can be the mass flow rate, temperature, pressure or volumetric flow rate.

Special Gas Connectors - We can provide a welded VCR female fitting on the gas inlet and output of the meter.

Industrial Connector Option - Controller can be outfitted with a screw on industrial connector for more secure fit on the communications cable. Supplied with a 10 ft. industrial connector cable.

Totalizer - On-Board display of the total flow from the last tare of the unit.



  • Item #: AX-MCE-FR

Apex Mass Flow Controllers-Vacuum MFC Semi Compliant

Price: $1,215.00
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